NIST Pressure and Vacuum Measurement
Presenters: Jacob Ricker and Julia Scherschligt, NIST Thermodynamic Metrology Group
Making good pressure measurements from ultra-high vacuum to atmospheric pressure requires the correct use of many kinds of gauges and proper use of vacuum technology. Among the most widely used gauges are ionization gauges, spinning rotor gauges, thermal conductivity gauges, capacitance diaphragm gauges, quartz bourdon tube gauges, resonant silicon gauges, and piston gauges. However, the incorrect use of any of these gauges can result in bad measurements that cost time and money.
This two-day course will cover the fundamentals of pressure measurements from 10-8 Pa to 10+5 Pa (10-10 torr to 10+3 torr), focusing on the selection and proper use of appropriate gauging technology for a given application. A survey of calibration techniques will be presented along with recommendations for obtaining best performance. Part of the class time will be devoted to set-up of a simple vacuum calibration system. This will enable live demonstration of some of the gauges discussed in the course, and give students an opportunity to participate in the vacuum system set-up and disassembly.
New is a section devoted the use of piston gauges. We will also bring back the popular overview of good vacuum system design and construction using off-the-shelf vacuum equipment and fittings. Basic vacuum system design do’s and don’ts will be covered. Pumping systems, sealing systems, valves, and vacuum plumbing solutions will be briefly covered. Attendees are invited to share their own pressure measurement and or vacuum system design problems for in-class discussion.